Details
Body Material
Aluminium
Seal Material
FKM
Brand
SMC
Series
XL2
Manufacturer
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Height mm
Operation
Width mm
Actuation
Feature
Length mm
Seal Type
Application
Ambient Temperature
Valve Material
Angle
Actuator Working Temperature
List Price
66
Normally Closed
171
Single acting
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
98
Bellows Seal
–
–
–
–
–
Available to Order
–
Normally Closed
–
–
–
–
Bellows Seal
High Vacuum
–
–
–
–
Available to Order
–
Normally Closed Bellows Seal
–
–
–
–
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
–
Available to Order
–
Normally Closed Bellows Seal
–
–
–
–
–
High Vacuum Angle Valve
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
38
Normally Closed
108
Single acting
Bellows seal
60
–
High vacuum angle valve for semiconductor and vacuum applications
5 to 60°C
Aluminium
Angle valve
–
Available to Order
–
–
–
Normally Closed
–
–
–
–
–
–
–
–
Available to Order
48
–
121
Normally Closed
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
74
Bellows Seal
High vacuum angle valve for semiconductor and vacuum applications
–
Aluminium
–
–
Available to Order
–
Normally Closed Bellows Seal
–
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
–
–
–
–
–
Available to Order
79
–
185
–
–
110
–
–
–
–
–
–
Available to Order
66
–
171
–
–
104
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
Normally Closed
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
Normally Closed Bellows Seal
–
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
High Vacuum
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
66
–
171
–
–
98
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
High Vacuum
–
–
Normally Closed
5 to 60°C
Available to Order
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