Details
Body Material
Aluminium
Seal Material
FKM
Brand
SMC
Series
XL2
Length mm
104
Height mm
66
Width mm
171
Manufacturer
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Operation
Actuation
Feature
Length mm
Seal Type
Application
Ambient Temperature
Valve Material
Height mm
Width mm
Angle
Actuator Working Temperature
List Price
Normally Closed
Single acting
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
98
Bellows Seal
–
–
–
66
171
–
–
Available to Order
Normally Closed
–
–
–
Bellows Seal
High Vacuum
–
–
–
–
–
–
Available to Order
Normally Closed Bellows Seal
–
–
–
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
–
–
–
Available to Order
Normally Closed Bellows Seal
–
–
–
–
High Vacuum Angle Valve
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
Normally Closed
Single acting
Bellows seal
60
–
High vacuum angle valve for semiconductor and vacuum applications
5 to 60°C
Aluminium
38
108
Angle valve
–
Available to Order
–
Normally Closed
–
–
–
–
–
–
–
–
–
–
Available to Order
–
Normally Closed
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
74
Bellows Seal
High vacuum angle valve for semiconductor and vacuum applications
–
Aluminium
48
121
–
–
Available to Order
Normally Closed Bellows Seal
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
110
–
–
–
–
79
185
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
Normally Closed
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
Normally Closed Bellows Seal
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
High Vacuum
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
98
–
–
–
–
66
171
–
–
Available to Order
–
–
–
–
–
High Vacuum
–
–
–
–
Normally Closed
5 to 60°C
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
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