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SMC High Vacuum Angle Valve
Product Code: XLA-16G-2M9//- Buy Price(exc VAT)
tech sheet
Details
Body Material
Aluminium
Length mm
60
Valve Material
Aluminium
Feature
Bellows seal
Seal Material
FKM
Brand
SMC
Width mm
108
Height mm
38
Series
XL2
Application
High vacuum angle valve for semiconductor and vacuum applications
Ambient Temperature
5 to 60°C
Operation
Normally Closed
Manufacturer
SMC
Angle
Angle valve
Actuation
Single acting
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Height mm
Width mm
Feature
Length mm
Seal Type
Application
Operation
Actuation
Actuator Working Temperature
Angle
List Price
66
171
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
98
Bellows Seal
–
Normally Closed
Single acting
–
–
Available to Order
–
–
–
–
Bellows Seal
High Vacuum
Normally Closed
–
–
–
Available to Order
–
–
–
–
–
High vacuum angle valve for semiconductor and vacuum applications
Normally Closed Bellows Seal
–
–
–
Available to Order
–
–
–
–
–
High Vacuum Angle Valve
Normally Closed Bellows Seal
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
Normally Closed
–
–
Available to Order
48
121
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
74
Bellows Seal
High vacuum angle valve for semiconductor and vacuum applications
–
Normally Closed
–
–
Available to Order
–
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
–
Normally Closed Bellows Seal
–
–
–
Available to Order
79
185
–
110
–
–
–
–
–
–
Available to Order
66
171
–
104
–
–
–
–
–
–
Available to Order
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–
–
–
–
–
–
–
–
–
Available to Order
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–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
Normally Closed
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
High Vacuum
Normally Closed Bellows Seal
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order
66
171
–
98
–
–
–
–
–
–
Available to Order
–
–
–
–
–
High Vacuum
–
–
5 to 60°C
Normally Closed
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order