Details
Brand
SMC
Manufacturer
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Height mm
Body Material
Operation
Series
Width mm
Actuation
Seal Material
Feature
Length mm
Seal Type
Application
Ambient Temperature
Valve Material
Angle
Actuator Working Temperature
List Price
66
Aluminium
Normally Closed
XL2
171
Single acting
FKM
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
98
Bellows Seal
–
–
–
–
–
Available to Order
–
Aluminium
Normally Closed
XL2
–
–
FKM
–
–
Bellows Seal
High Vacuum
–
–
–
–
Available to Order
–
Aluminium
Normally Closed Bellows Seal
XL2
–
–
FKM
–
–
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
–
Available to Order
–
Aluminium
Normally Closed Bellows Seal
XL2
–
–
FKM
–
–
–
High Vacuum Angle Valve
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
38
Aluminium
Normally Closed
XL2
108
Single acting
FKM
Bellows seal
60
–
High vacuum angle valve for semiconductor and vacuum applications
5 to 60°C
Aluminium
Angle valve
–
Available to Order
–
Aluminium
–
XL2
–
Normally Closed
FKM
–
–
–
–
–
–
–
–
Available to Order
48
Aluminium
–
XL2
121
Normally Closed
FKM
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
74
Bellows Seal
High vacuum angle valve for semiconductor and vacuum applications
–
Aluminium
–
–
Available to Order
–
Aluminium
Normally Closed Bellows Seal
XL2
–
–
FKM
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
–
–
–
–
–
Available to Order
79
Aluminium
–
XL2
185
–
FKM
–
110
–
–
–
–
–
–
Available to Order
66
Aluminium
–
XL2
171
–
FKM
–
104
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
Aluminium
–
XL2
–
Normally Closed
FKM
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
Aluminium
Normally Closed Bellows Seal
XL2
–
–
FKM
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
High Vacuum
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
66
Aluminium
–
XL2
171
–
FKM
–
98
–
–
–
–
–
–
Available to Order
–
Aluminium
–
XL2
–
–
FKM
–
–
–
High Vacuum
–
–
Normally Closed
5 to 60°C
Available to Order
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