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SMC High Vacuum Angle Valve
Product Code: XLA-16G-2- Buy Price(exc VAT)
tech sheet
Details
Body Material
Aluminium
Seal Material
FKM
Brand
SMC
Series
XL2
Application
High vacuum angle valve for semiconductor and vacuum applications
Manufacturer
SMC
Seal Type
Bellows Seal
Actuation
Normally Closed
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Height mm
Operation
Width mm
Actuation
Feature
Length mm
Application
Ambient Temperature
Valve Material
Angle
Actuator Working Temperature
List Price
66
Normally Closed
171
Single acting
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
98
–
–
–
–
–
Available to Order
–
Normally Closed
–
–
–
–
High Vacuum
–
–
–
–
Available to Order
–
Normally Closed Bellows Seal
–
–
–
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
–
Available to Order
–
Normally Closed Bellows Seal
–
–
–
–
High Vacuum Angle Valve
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
38
Normally Closed
108
Single acting
Bellows seal
60
High vacuum angle valve for semiconductor and vacuum applications
5 to 60°C
Aluminium
Angle valve
–
Available to Order
–
–
–
Normally Closed
–
–
–
–
–
–
–
Available to Order
48
–
121
Normally Closed
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
74
High vacuum angle valve for semiconductor and vacuum applications
–
Aluminium
–
–
Available to Order
–
Normally Closed Bellows Seal
–
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
–
–
–
–
Available to Order
79
–
185
–
–
110
–
–
–
–
–
Available to Order
66
–
171
–
–
104
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
Normally Closed
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
Normally Closed Bellows Seal
–
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
High Vacuum
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
66
–
171
–
–
98
–
–
–
–
–
Available to Order
–
–
–
–
–
–
High Vacuum
–
–
Normally Closed
5 to 60°C
Available to Order