SMC Slit Valve

Application

Partition valve between load lock chamber and transfer chamber and between transfer chamber and process chamber in semiconductor manufacturing equipment

Valve Material

FKM (Gate O-ring Material)

Accessories

Gasket with wiper for bellows protection Rubber cushions for impact absorption End lock mechanism

Brand

SMC

Series

XGT

Manufacturer

SMC

Model

XGT223-46236-1F