Details
Actuation
Cassette Type Standard
Application
Partition valve between load lock chamber and transfer chamber and between transfer chamber and process chamber in semiconductor manufacturing equipment
Material
Gate O-ring FKM
Brand
SMC
Series
XGT
Manufacturer
SMC
Specification
SMC Slit Valve, SMC
Additional Variants
Product Name
Product Code
Model
Valve Material
Accessories
List Price
XGT223-46236-1F
FKM (Gate O-ring Material)
Gasket with wiper for bellows protection Rubber cushions for impact absorption End lock mechanism
Available to Order
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